| 摘要 |
<p>Described herein is an optical system (100) for reducing the effects of speckle in an interferometer system. The system (100) comprises a laser array (110), intermediate optics (120), a diffuser (130), an integrator (140), and a projection lens system (150) comprising first and second light projection lenses (160, 170) with and an aperture (180) located therebetween. The integrator (140) comprises a uniform output face (190) which can be considered to be a secondary source that is very homogeneous in intensity. The secondary source has been shown to have low speckle contrast whilst retaining high temporal coherence. The low speckle contrast is inversely proportional to the number of laser emitters in the laser array (110) and therefore a vertical cavity surface emitting laser is the preferred laser array as at least 1000 individual emitters can be provided in one device.</p> |
