Clamping device, assembly and lithographic projection apparatus

摘要

A clamping device (301) is constructed and arranged to clamp two parts (302, 328) together. The clamping device has an aligner constructed and arranged to bring the two parts in an aligned position with respect to each other, a clamp constructed and arranged to maintain the two parts in the aligned position, a disconnect constructed and arranged to guide the two parts away from the aligned position to a disconnected position, and an actuator constructed and arranged to convert an electrical current to kinetic energy.