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发明名称
摘要
申请公布号
JP5101651(B2)
申请公布日期
2012.12.19
申请号
JP20100074976
申请日期
2010.03.29
申请人
发明人
分类号
H03H9/02;H01L23/58;H01L25/16
主分类号
H03H9/02
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代理人
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