DETECTION METHOD AND DETECTION DEVICE

摘要

A detection method of detecting a position of a particular one of a plurality of substrates stacked on each other, includes applying illumination to a region covering a portion of an edge of the particular substrate, obtaining an image by imaging the region, and identifying a position of the edge of the particular substrate based on a position of a step-like portion present in the image. At least one of (i) a direction in which the illumination is applied to the region in the applying and (ii) a direction in which the region is imaged in the obtaining is at angle with respect to a plane orientation of the particular substrate.