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发明名称
摘要
申请公布号
JP5099942(B2)
申请公布日期
2012.12.19
申请号
JP20000362320
申请日期
2000.11.29
申请人
发明人
分类号
H01L21/28;H01L21/336;H01L21/288;H01L21/44;H01L29/786;H01L51/10;H01L51/40
主分类号
H01L21/28
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代理人
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