发明名称 COMPONENT HAVING A VIA, AND A METHOD FOR PRODUCING THE COMPONENT
摘要 <p>A component including a via for electrical connection between a first and a second plane of a substrate is provided. The substrate has a borehole having an inner wall that is coated with a conductive layer made of an electrically conductive material, an intermediate layer being disposed between the inner wall and the conductive layer. The intermediate layer includes electrically insulating SiC.</p>
申请公布号 EP2380193(B1) 申请公布日期 2012.12.19
申请号 EP20090737421 申请日期 2009.10.20
申请人 ROBERT BOSCH GMBH 发明人 TRAUTMANN, ACHIM;MUELLER, THORSTEN
分类号 H01L23/48;H01L21/768;H01L23/498 主分类号 H01L23/48
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