Sampling microscope and method for imaging an object using a light microscope

摘要

The scanning microscope (100) has a scanning device (33) that varies direction of incidence of illuminating light beam (12) directed onto a portion of an entrance pupil (14) of an illumination optics (10) in order to move an illumination focus across target region to be illuminated. An observation objective (38) is spatially separated from illumination optics such that optical axis (O3) of observation objective is perpendicular to illuminated target region and is arranged at an acute angle with respect to optical axis (O1) of illumination optics. An independent claim is included for method for manufacturing scanning microscope.