摘要 |
PROBLEM TO BE SOLVED: To provide a multilayer ceramic substrate which has excellent resistance in high temperature and high humidity environments, can prevent degradation in characteristics, forms a highly reliable external electrode and improves adhesion intensity between the external electrode and glass ceramic, and its manufacturing method. SOLUTION: The multilayer ceramic substrate 4 including the glass ceramic 5 and the external electrode 2 formed at least on one of principal planes of the glass ceramic 5 is characterized in that resin 7 is filled in at least part of an interface between the electrode 2 and the ceramic 5. In addition, the multilayer ceramic substrate 4 including the glass ceramic 5 and the external electrode 2 formed at least on one of principal planes of the ceramic 5 is characterized by a step of soaking the sintered substrate 4 in an aqueous solution and a step of thermally treating it at a temperature of 250°C or higher and 800°C or lower. COPYRIGHT: (C)2009,JPO&INPIT |