发明名称 SURFACE PROTECTION TAPE FOR DICING AND METHOD FOR PEELING AND REMOVING SURFACE PROTECTION TAPE FOR DICING
摘要 <p>The present invention aims to provide a surface protection tape for use in a dicing step, which protects a surface of a material to be cut from staining owing to attachment of dust and the like such as shavings by sticking the surface protection tape on the surface of the material to be cut in the dicing step and cutting the tape together with the material to be cut, and which is easily peeled and removed from individual chips after the dicing step. There is provided a surface protection tape for dicing to be stuck on a surface of a material to be cut and to be cut together with the material to be cut, which includes a contractible film layer that contracts in at least one axis direction by a stimulus and laminated thereon a restriction layer that restricts the contraction of the contractible film layer, and which is peeled off with undergoing spontaneous rolling from one end part in one direction or from opposing two end parts toward a center to form one or two cylindrical rolls when the stimulus that causes the contraction is applied.</p>
申请公布号 EP2352166(A4) 申请公布日期 2012.12.19
申请号 EP20090829030 申请日期 2009.11.19
申请人 NITTO DENKO CORPORATION 发明人 NISHIO, AKINORI;KIUCHI, KAZUYUKI;TAKAHASHI, TOMOKAZU
分类号 H01L21/301;C09J7/02;H01L21/683 主分类号 H01L21/301
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