发明名称 |
Single wafer fabrication process for wavelength dependent reflectance for linear optical serialization of accelerometers |
摘要 |
A plurality of Fabry-Perot interferometric sensors are optically coupled in series with each other to form an ordered optical series. Each Fabry-Perot interferometric sensor has a unique signalband and a passband. Each Fabry-Perot interferometric sensor has its unique signalband within the passbands of all of the next higher ordered Fabry-Perot interferometric sensors in the optical series so that a corresponding unique fringe signal from each of the Fabry-Perot interferometric sensors is a multiplexed output from the optical series. |
申请公布号 |
US8334984(B2) |
申请公布日期 |
2012.12.18 |
申请号 |
US20090545700 |
申请日期 |
2009.08.21 |
申请人 |
PEREZ MAXIMILLIAN A.;SHKEL ANDREI A.;THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
PEREZ MAXIMILLIAN A.;SHKEL ANDREI A. |
分类号 |
G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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