发明名称 |
Pixel sensors of multiple pixel size and methods of implant dose control |
摘要 |
CMOS pixel sensors with multiple pixel sizes and methods of manufacturing the CMOS pixel sensors with implant dose control are provided. The method includes forming a plurality of pixel sensors in a same substrate and forming a masking pattern over at least one of the plurality of pixel sensors that has a pixel size larger than a non-masked pixel sensor of the plurality of pixel sensors. The method further includes providing a single dosage implant to the plurality of pixel sensors. The at least one of the plurality of pixel sensors with the masking pattern receives a lower dosage than the non-masked pixel sensor. |
申请公布号 |
US8334195(B2) |
申请公布日期 |
2012.12.18 |
申请号 |
US20090556139 |
申请日期 |
2009.09.09 |
申请人 |
ELLIS-MONAGHAN JOHN J.;GAMBINO JEFFREY P.;MAYNARD DANIEL N.;RASSEL RICHARD J.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ELLIS-MONAGHAN JOHN J.;GAMBINO JEFFREY P.;MAYNARD DANIEL N.;RASSEL RICHARD J. |
分类号 |
H01L21/22 |
主分类号 |
H01L21/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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