| 摘要 |
There are provided a method of manufacturing a metal mold suitable for forming, for example, a reflection mirror for a projection optical system and a reflection mirror for the projection optical system manufactured by the method thereof. The method includes a first process of cutting or grinding a metal mold material MM to trim the shape of the transfer optical surface and a second process of radiating the electron beam onto the transfer optical surface so as to perform smoothing process. By radiation of the electron beam, tool makes and the like created on the metal mold material MM in the first process can be erased so that the surface can be smoothed while maintaining the shape of the transfer optical surface. |
