CLEANING SHEET, CLEANING MEMBER, CLEANING METHOD, AND CONTINUITY TEST APPARATUS

摘要

PURPOSE: A cleaning sheet, a cleaning member, a cleaning method and a continuity test are provided to effectively remove foreign material attached on a probe needle without abrading the probe needle by forming a cleaning layer on the cleaning sheet. CONSTITUTION: A cleaning sheet(1) includes a cleaning layer(2). The cleaning layer removes foreign materials attached on a probe needle of a probe card for a continuity test. The arithmetic average roughness of the cleaning layer is less than 100nm. The dynamic hardness of the cleaning layer is 0.0001 to 0.1. A separator is located on both sides of the cleaning sheet.