| 摘要 |
A semiconductor storage device includes a semiconductor substrate having a first region of a first conductivity type in between respective regions of an opposite conductivity type, at least the first region being covered by a first dielectric layer, a polysilicon floating gate placed on the first dielectric layer over the first region, said floating gate being surrounded by an insulating material; and a metal control gate structure adjacent to the polysilicon floating gate, the metal control gate structure being capacitively coupled to said floating gate. A method of manufacturing such a semiconductor storage device is also disclosed. |
