| 摘要 |
<p>PURPOSE: A switching device for a substrate carrier container, a switching device for a cover, and a semiconductor manufacturing device are provided to prevent abrasion of a seal member by controlling a sliding movement of the seal member formed around an edge part of an opening part. CONSTITUTION: An elevation body(22) is installed by an elevating mechanism which can be elevated. A cover member(23) is supported by the elevation body and opens and closes a second opening part. A seal member seals an interval of the cover member and an edge part of the second opening part. A cover removing tool(51) mounts and removes a cover of a carrier container. A guide part(26) restricts the posture of the cover member and guides the cover member upwards.</p> |
