| 发明名称 |
SUBSTRATE FRAME SUCTION APPARATUS AND CONTROL METHOD FOR THE SAME |
| 摘要 |
<p>PURPOSE: A substrate frame absorption device and a control method thereof are provided to prevent twisting and bending of a substrate frame by successively gradually absorbing the substrate frame on an adsorption plate. CONSTITUTION: A body comprises one chamber(21a) which opens an upper side. An adsorption plate(22) covers the upper side of the chamber. The adsorption plate is formed with the porous material. A pressure controlling device(23) is connected to chamber and controls pressure of the chamber. One chamber comprises a plurality of chambers which is divided through a partition wall.</p> |
| 申请公布号 |
KR20120135636(A) |
申请公布日期 |
2012.12.17 |
| 申请号 |
KR20110054457 |
申请日期 |
2011.06.07 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
PARK, YON MOOK |
| 分类号 |
H01L21/02;H01L21/683 |
主分类号 |
H01L21/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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