| 摘要 |
PURPOSE: An adhesion chuck and a manufacturing method thereof are provided to certainly support a substrate by attaching an adhesion layer to the lower part of a base unit. CONSTITUTION: An adhesion chuck includes a base unit(110), a surface unit(121), and an adhesion layer(140). The surface unit includes a surface reforming layer(120). The surface reforming layer is formed in the upper part of the base unit. The adhesion layer is located on the surface unit. The adhesion layer is formed by curing or aging adhesive material(130) under atmospheric pressure. |
