| 摘要 |
PURPOSE: A temperature change system is provided to easily facilitate the assembly of a bake plate by thermally connecting a passive cooling tool and an active cooling tool at high speed. CONSTITUTION: A bake play part(205) comprises a heater layer(224) connected to a heater stand(226). The heater stand is connected to a heat dispersion unit. A heat pad(210) is connected to a cooling plate. A passive cooling tool is arranged adjacently to the bake plate. An active cooling tool is arranged adjacently to the passive cooling tool. [Reference numerals] (225) Vacuum source; (234) Substrate absorbing port; (236) Pad absorbing port; (AA) Discharging cooling water; (BB) Supplying cooling water
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