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发明名称
INSPECTION METHOD AND APPARATUS, LITHOGRAPHIC APPARATUS, LITHOGRAPHIC PROCESSING CELL AND DEVICE MANUFACTURING METHOD.
摘要
申请公布号
NL2008681(A)
申请公布日期
2012.12.17
申请号
NL20122008681
申请日期
2012.04.23
申请人
ASML NETHERLANDS B.V.
发明人
OSTEN WOLFGANG;FRENNER KARSTEN;BILSKI BARTOSZ
分类号
G03F7/20;H01L21/66
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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