| 摘要 |
PURPOSE: A wafer processing apparatus is provided to simplify wafer processing by including a transport robot for loading and unloading a wafer from a load lock chamber. CONSTITUTION: Eight or ten reactors(2) are included on a same plane. The eight or ten reactors have same performance for processing a wafer. A wafer handling chamber(4) comprises two wafer handling robot arms(3). A load lock chamber(5) loads or unloads two wafers at the same time. A sequencer loads or unloads a wafer which is processed or does not processed to units using the two wafer handling robot arms. |
