Method for manufacturing vibratory actuator for e.g. resistive type touch panel of mobile terminal, involves forming first vibratory actuator element, coupling interface and electrodes, and forming first multilayer structure on substrate

摘要

The method involves forming a first vibratory actuator element on a substrate (SB) to vibrate in response to an electrical signal, and forming a first mechanical coupling interface coupled to the element and a control unit (CNTC), where the coupling interface vibrates the control unit as the element vibrates. First electrodes are formed to transmit the electrical signal to the element. A first multilayer structure is formed on the substrate. A second multilayer structure is formed on the substrate by forming a second vibratory actuator element and second electrodes. Independent claims are also included for the following: (1) a vibratory device (2) a system comprising a touch panel.