| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress a generation amount of residue adhering and depositing on a surface of a heating member when a resin film is formed for a long time. <P>SOLUTION: When a resin film is formed on a substrate, at least a vaporization step of supplying a liquid resin raw material 30 onto a surface of a heating member 10 that has been heated and vaporizing the liquid resin raw material 30 is carried out. The heating member 10 comprises a heating member body 12 made of metal and an oil-repellent layer 14 covering at least a part of the surface of the heating member body 12. <P>COPYRIGHT: (C)2013,JPO&INPIT |
