| 摘要 |
A piezoelectric actuator includes a frequency controller that controls the frequency and power of the driving signal, wherein when the phase difference falls within a predetermined range, the control unit stores the value of the frequency of the driving signal as a first frequency memory value, sets a voltage to a upper limit voltage value, and performs control of adjusting the frequency of the driving signal so that the phase difference is maintained to be within a predetermined range, and when the frequency of the driving signal is changed from the first frequency memory value by an amount exceeding a first value determined in advance, the control unit stores the value of the frequency of the driving signal as a second frequency memory value and sets the voltage to a lower limit voltage value lower than the upper limit voltage value.
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