PHOTODIODE, METHOD FOR MANUFACTURING SAME, PHOTODIODE ARRAY, SPECTROPHOTOMETER, AND DEVICE FOR IMAGING SOLIDS

摘要

A photodiode provided with a high-concentration layer on the surface thereof, the high-concentration layer being formed so that the thickness of an un-depleted region is greater than that of irregularities in the interface between silicon and an insulating film layer, and less than the penetration depth of ultraviolet light.