| 摘要 |
<p>Provided are a charged particle beam device and sample production method, with which, in FIB processing which is sample dependent, it is possible to carry out efficient processing to obtain a desired shape without the individual differences of workers affecting the processing. The charged particle beam device has mounted therein: an ion beam optical system device for irradiating a sample with an ion beam generated by an ion source, and a device for controlling the ion beam optical system device; an element detector for detecting the constituent element of the sample, and a device for controlling the element detector; and a central processing device for automatically setting processing conditions for the sample on the basis of the element specified by the element detector.</p> |
