| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and system for providing a texture to a surface of a workpiece, such as a chamber component. <P>SOLUTION: The method includes providing a workpiece to a texturizing chamber and scanning a beam of electromagnetic energy across the surface of the workpiece to form a plurality of features thereon. The features formed are generally depressions, protuberances, and combinations thereof. A method of reducing contamination in a process chamber is also provided. The method includes scanning a beam of electromagnetic energy across a surface of one or more process chamber components to form a plurality of features thereon, positioning the one or more chamber components into a process chamber, and initiating a process sequence within the process chamber. <P>COPYRIGHT: (C)2013,JPO&INPIT |
