发明名称 MASS SPECTROMETRY FOR GAS ANALYSIS WITH A ONE-STAGE CHARGED PARTICLE DEFLECTOR LENS BETWEEN A CHARGED PARTICLE SOURCE AND A CHARGED PARTICLE ANALYZER BOTH OFFSET FROM A CENTRAL AXIS OF THE DEFLECTOR LENS
摘要 Apparatus, methods and systems are provided to inhibit a sightline from a charged particle source to an analyzer and for changing a baseline offset of an output spectrum of an analyzer. A supply of charged particles is directed through a hollow body of a deflector lens that is positioned relative to a charged particle source and an analyzer. A flow path along a preferred flow path through a deflector lens permits passage of the ions from the source to the detector while inhibiting a sightline from the detector to the source in a direction parallel to the central longitudinal axis of the deflector lens.
申请公布号 WO2012170168(A2) 申请公布日期 2012.12.13
申请号 WO2012US38271 申请日期 2012.05.17
申请人 MKS INSTRUMENTS, INC.;SHAW, PHILIP, NEIL;BATEY, JONATHAN, HUGH 发明人 SHAW, PHILIP, NEIL;BATEY, JONATHAN, HUGH
分类号 H01J3/14;H01J49/06 主分类号 H01J3/14
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