| 摘要 |
<p>Provided are an elastic wave device that has excellent reliability and a manufacturing method therefor. An elastic wave device (1) is provided with a piezoelectric substrate (20), and an IDT electrode (10) formed on top of the piezoelectric substrate (20). At least one part of the IDT electrode (10) has a first metal layer (13) that does not contain Al, a second metal layer (15) that contains Al, and a third metal layer (17) that does not contain Al. The second metal layer (15) is disposed above the first metal layer (13). The third metal layer (17) is disposed above the second metal layer (15). At least one part of the IDT electrode (10) also has a first metal oxide layer (14) made from an oxide of the first metal layer (13), and a second metal oxide layer (16) made from an oxide of the second metal layer (15). The first metal oxide layer (14) is disposed between the first metal layer (13) and the second metal layer (15). The second metal oxide layer (16) is disposed between the third metal layer (17) and the second metal layer (15).</p> |
