发明名称 NEAR-INFRARED LIGHT ABSORBING FILM FORMATION MATERIAL, AND LAMINATED FILM HAVING NEAR-INFRARED LIGHT ABSORBING FILM
摘要 <P>PROBLEM TO BE SOLVED: To provide a material for absorbing near-infrared light for use in an optical auto-focus, and a laminated film including a near-infrared absorbing film formed of the material and a photoresist film. <P>SOLUTION: A near-infrared light absorbing film formation material contains (A) a polymer compound containing at least one kind of formulas (1) to (4); (B) a polymer compound containing an aromatic ring (except for the (A) component); (C) a near-infrared light absorbing dye and (D) a solvent. (In the formulas, R<SP POS="POST">1</SP>, R<SP POS="POST">7</SP>, R<SP POS="POST">9</SP>and R<SP POS="POST">14</SP>are H, CH<SB POS="POST">3</SB>, F or CF<SB POS="POST">3</SB>; R<SP POS="POST">2</SP>to R<SP POS="POST">6</SP>are H, F, CF<SB POS="POST">3</SB>, -C(CF<SB POS="POST">3</SB>)<SB POS="POST">2</SB>OR<SP POS="POST">16</SP>, an alkyl group or an alkoxy group; one or more of R<SP POS="POST">2</SP>to R<SP POS="POST">6</SP>is a fluorine atom or a group containing fluorine; R<SP POS="POST">16</SP>, R<SP POS="POST">8</SP>and R<SP POS="POST">13</SP>are H or a monovalent organic group; and R<SP POS="POST">15</SP>is a hydrocarbon group substituted by a fluorine atom.) <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012247777(A) 申请公布日期 2012.12.13
申请号 JP20120110215 申请日期 2012.05.14
申请人 SHIN ETSU CHEM CO LTD;INTERNATL BUSINESS MACH CORP <IBM> 发明人 TACHIBANA SEIICHIRO;NODA KAZUMI;OHASHI MASAKI;KANAO TAKESHI;U SUNG HWAN;DARIO GOLDFARB;KING Y LEE;MARTIN GRODE
分类号 G03F7/11;H01L21/027 主分类号 G03F7/11
代理机构 代理人
主权项
地址