发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A semiconductor device and its manufacturing method are disclosed. The semiconductor device comprises a gate, and source and drain regions on opposite sides of the gate, wherein a portion of a gate dielectric layer located above the channel region is thinner than a portion of the gate dielectric layer located at the overlap region of the drain and the gate. The thicker first thickness portion may ensure that the device can endure a higher voltage at the drain to gate region, while the thinner second thickness portion may ensure excellent performance of the device.
申请公布号 US2012313165(A1) 申请公布日期 2012.12.13
申请号 US201113305537 申请日期 2011.11.28
申请人 SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION 发明人 LIU JINHUA
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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