| 摘要 |
<p>In the present invention, a stage device is controlled as follows: a marker that allows measurement of position and orientation is provided on a sample, a sample holder, or a rotating table; a stage is rotated and translated in accordance with a given movement pattern; the position and orientation of the marker are then measured; the results of said measurement are used to identify the position of the center of rotation of the rotating table; a table of correction amounts with respect to rotation angle is created by determining rotation-angle correction amounts, which correct rotational error, and translation correction amounts, which correct variation in the position of the aforementioned center of rotation; correction amounts corresponding to an inputted rotation-angle command value or an actual rotation angle are acquired from the aforementioned table; and inputted rotation and translation command values or a detected rotation angle and translation position are corrected.</p> |
