| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing apparatus for a glass particle deposited body which is capable of stably and efficiently manufacturing the glass particle deposited body with high quality while controlling the attachment and incorporation of foreign matter. <P>SOLUTION: In the manufacturing apparatus 10 for the glass particle deposited body to deposit the glass particles generated by the hydrolysis reaction of the flame of a burner 13 and the target within a reaction vessel 11, a clean air introduction port 39 is installed at the lateral side face of the arrangement side of the burner 13 in the reaction vessel 11, and a rectification part 23 in which a plurality of rectification bars 24 whose inner side with respect to the reaction vessel 11 is a convex surface are lined at predetermined intervals G is installed at the clean air introduction port 39. <P>COPYRIGHT: (C)2013,JPO&INPIT |
