| 摘要 |
A distance measurement method includes imaging a first light source emitting a first wavelength, on a region of a substrate with a dispersive confocal lens; imaging a second light source emitting a second wavelength with the dispersive confocal lens on the region of the substrate; measuring intensity of light reflection emitted from the first light source; measuring intensity of light reflection emitted from the second light source; and generating a first response function wherein the first response function represents reflected light intensity emitted from the first light source as a function of the distance.
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