发明名称 Mass Spectrometry for a Gas Analysis with a Two-Stage Charged Particle Deflector Lens Between a Charged Particle Source and a Charged Particle Analyzer both Offset from a Central Axis of the Deflector Lens
摘要 Apparatus, methods and systems are provided to inhibit a sightline from a charged particle source to an analyzer and for changing a baseline offset of an output spectrum of an analyzer. A supply of charged particles is directed through a hollow body of a deflector lens that is positioned relative to a charged particle source and an analyzer. A flow path along a preferred flow path through a deflector lens permits passage of the ions from the source to the detector while inhibiting a sightline from the detector to the source in a direction parallel to the central longitudinal axis of the deflector lens.
申请公布号 US2012313004(A1) 申请公布日期 2012.12.13
申请号 US201113155894 申请日期 2011.06.08
申请人 SHAW PHILIP NEIL;BATEY JONATHAN HUGH;MKS INSTRUMENTS, INC. 发明人 SHAW PHILIP NEIL;BATEY JONATHAN HUGH
分类号 H01J3/14 主分类号 H01J3/14
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