发明名称 |
Mass Spectrometry for a Gas Analysis with a Two-Stage Charged Particle Deflector Lens Between a Charged Particle Source and a Charged Particle Analyzer both Offset from a Central Axis of the Deflector Lens |
摘要 |
Apparatus, methods and systems are provided to inhibit a sightline from a charged particle source to an analyzer and for changing a baseline offset of an output spectrum of an analyzer. A supply of charged particles is directed through a hollow body of a deflector lens that is positioned relative to a charged particle source and an analyzer. A flow path along a preferred flow path through a deflector lens permits passage of the ions from the source to the detector while inhibiting a sightline from the detector to the source in a direction parallel to the central longitudinal axis of the deflector lens. |
申请公布号 |
US2012313004(A1) |
申请公布日期 |
2012.12.13 |
申请号 |
US201113155894 |
申请日期 |
2011.06.08 |
申请人 |
SHAW PHILIP NEIL;BATEY JONATHAN HUGH;MKS INSTRUMENTS, INC. |
发明人 |
SHAW PHILIP NEIL;BATEY JONATHAN HUGH |
分类号 |
H01J3/14 |
主分类号 |
H01J3/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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