发明名称 ORGANIC FILM TRANSISTOR ARRAY SUBSTRATE, AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide an organic film transistor array, and a method of manufacturing the same. <P>SOLUTION: The manufacturing method comprises the steps of: forming a first pixel electrode pattern, a source electrode pattern, a drain electrode pattern, and a data line pattern by forming a first transparent conductive film layer and a source and drain metal film layer on a base substrate in order, and subsequently performing a first patterning process; forming an organic semiconductor island pattern and a gate insulating island pattern which are located over the source and drain electrode patterns by forming an organic semiconductor film layer and a gate insulating film layer in order, and subsequently performing a second patterning process; forming a data line pad region by forming a single passivation layer film, and subsequently performing a third patterning process; and forming a second pixel electrode pattern, a gate electrode pattern, and a gate line pattern by forming a second transparent conductive film layer and a gate metal film layer in order, and subsequently performing a fourth patterning process. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012248840(A) 申请公布日期 2012.12.13
申请号 JP20120118451 申请日期 2012.05.24
申请人 BOE TECHNOLOGY GROUP CO LTD 发明人 ZHANG XUEHUI
分类号 H01L21/336;G02F1/1368;H01L29/786;H01L51/05 主分类号 H01L21/336
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