| 摘要 |
<P>PROBLEM TO BE SOLVED: To automatically age a cathode electrode, a high-frequency amplifier and an accelerator. <P>SOLUTION: An aging device 200 includes: a parameter storage section 216 that stores a set value table 230; a parameter setting section 250 that gradually changes a set value from an initial value to a rated value based on the set value table; an electric power control section 252 that controls electric power supply processing by an electric power supply section based on the set value changed by the parameter setting section; an error determination section 254 that determines whether at least one of units satisfies a preset error determination condition or not; and a stop control section 256 that performs stop processing of stopping the electric power supply processing by the electric power supply section if it is determined that the error determination condition is satisfied. When the stop processing is performed, the parameter setting section changes the set value of a parameter to any of the set values prior to the set value during performing the stop processing. <P>COPYRIGHT: (C)2013,JPO&INPIT |
