发明名称 SEMICONDUCTOR DEVICE, SEMICONDUCTOR SUBSTRATE, METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
摘要 <p>Provided is a semiconductor device of which: the first source and first drain of a first MISFET having a first channel type formed on a first semiconductor crystal layer comprise a compound of the atoms constituting the first semiconductor crystal layer and nickel atoms, a compound of the atoms constituting the first semiconductor crystal layer and cobalt atoms, or a compound of the atoms constituting the first semiconductor crystal layer, nickel atoms, and cobalt atoms; and the second source and second drain of a second MISFET having a second channel type formed on a second semiconductor crystal layer comprise a compound of the atoms constituting the second semiconductor crystal layer and nickel atoms, a compound of the atoms constituting the second semiconductor crystal layer and cobalt atoms, or a compound of the atoms constituting the second semiconductor crystal layer, nickel atoms, and cobalt atoms.</p>
申请公布号 WO2012169210(A1) 申请公布日期 2012.12.13
申请号 WO2012JP03772 申请日期 2012.06.08
申请人 SUMITOMO CHEMICAL COMPANY, LIMITED;THE UNIVERSITY OF TOKYO;NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY;HATA, MASAHIKO;YAMADA, HISASHI;YOKOYAMA, MASAFUMI;KIM, SANGHYEON;TAKENAKA, MITSURU;TAKAGI, SHINICHI;YASUDA, TETSUJI 发明人 HATA, MASAHIKO;YAMADA, HISASHI;YOKOYAMA, MASAFUMI;KIM, SANGHYEON;TAKENAKA, MITSURU;TAKAGI, SHINICHI;YASUDA, TETSUJI
分类号 H01L21/8238;H01L21/02;H01L21/28;H01L21/336;H01L21/76;H01L21/762;H01L27/08;H01L27/092;H01L27/095;H01L27/12;H01L29/417;H01L29/786 主分类号 H01L21/8238
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