| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique capable of efficiently manufacturing a solar cell satisfying a required performance. <P>SOLUTION: A manufacturing method of a solar cell is to update prescribed film-making conditions, under which thin film layers included in the solar cell are formed, on the basis of parameters having correlation with a film quality of the thin film layers at a prescribed timing, then under the new film-making conditions, the solar cell is to be manufactured. This manufacturing method includes: a normal process of forming a film constituting a solar cell under prescribed film-making conditions; a test film forming process of forming as a test film at least one kind of film constituting the solar cell at a prescribed timing not included in the normal process; an obtaining process of obtaining parameters having correlation with a film quality of the test film; and an updating process of newly updating the prescribed film-making conditions so that the parameters are within a prescribed extent and manufacturing the solar cell under the newly updated film-making conditions. <P>COPYRIGHT: (C)2013,JPO&INPIT |
