| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum degreasing and cleaning apparatus and a vacuum degreasing and cleaning method capable of preventing particulate deposits from sticking again after cleaning an object to be cleaned with a small amount of solvent irrespective of a loading method for the object to be cleaned. <P>SOLUTION: The vacuum degreasing and cleaning apparatus includes a cleaning chamber having an injector and a sprayer that eject a solvent to an object to be cleaned, a plurality of storage tanks that store the solvent, a distiller that distills the solvent in the storage tanks, and a replenisher tank that stores the solvent distilled by the distiller, and a heating means is provided in the inside of the sprayer in a nesting manner. Also, in the vacuum degreasing and cleaning method using the vacuum degreasing and cleaning apparatus, the solvent is pressurized and supplied to the inside of the sprayer, and heated to a temperature not lower than a saturation temperature in the cleaning chamber under a reduced pressure, and thereafter the solvent is sprayed in the cleaning chamber under the reduced pressure. <P>COPYRIGHT: (C)2013,JPO&INPIT |
