发明名称 |
SUBSTRATE SUPPORT SRRUCTURE, CLAMP PREPARATION UNIT, AND LITHOGRAPHY SYSTEM |
摘要 |
A substrate support structure for clamping a substrate on a surface by means of a capillary layer of a liquid. The surface has an outer edge and includes one or more substrate supporting elements for receiving the substrate to be clamped, wherein the one or more substrate supporting elements are arranged to provide support for the substrate at a plurality of support locations. The substrate support structure further includes a sealing structure circumscribing the surface and having a top surface or edge forming a sealing rim. A distance between the outer edge of the surface and an outermost of the support locations is greater than a distance between the outer edge and the sealing rim. |
申请公布号 |
KR20120135413(A) |
申请公布日期 |
2012.12.13 |
申请号 |
KR20127024406 |
申请日期 |
2011.02.18 |
申请人 |
MAPPER LITHOGRAPHY IP B.V. |
发明人 |
DE JONG HENDRIK JAN |
分类号 |
H01L21/027;G03F7/20;H01L21/683 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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