MANUFACTURING METHOD OF SOLID-STATE IMAGE PICKUP DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for improving a yield while maintaining optical characteristics of a solid-state image pickup device having a light-shielding film.

SOLUTION: The manufacturing method of a solid-state image pickup device including a pixel part and a peripheral circuit part comprises the steps of: forming a first insulating film at the pixel part and the peripheral circuit part; forming a second insulating film on the first insulating film; etching the second insulating film of a photoelectric conversion part; forming a metal film on the etched second insulating film of the photoelectric conversion part and the second insulating film of the peripheral circuit part; and removing the metal film of the peripheral circuit part and forming the light-shielding film from the metal film at the photoelectric conversion part.

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