发明名称 MANUFACTURING METHOD OF ORGANIC THIN FILM, LAMINATED BODY, AND SUBSTRATE
摘要 <P>PROBLEM TO BE SOLVED: To provide a laminated body consisting of an organic thin film and an inorganic thin film laminated in a vacuum, wherein the entry of foreign matter into the organic thin film is controlled. <P>SOLUTION: Provided are the manufacturing method of organic thin film characterized by polymerizing an ionic liquid monomer in vacuum to form the film; and the laminated body 1 characterized by lamination of the organic thin film 13 obtained by such a method and inorganic thin film layers (a first inorganic thin film layer 12 and a second inorganic film layer 14). <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012246467(A) 申请公布日期 2012.12.13
申请号 JP20110121854 申请日期 2011.05.31
申请人 SUMITOMO CHEMICAL CO LTD 发明人 YANAGAWA MASAO;SENDA TAICHI;KURODA TOSHIYA;WATANABE KAZUFUMI
分类号 C08F2/00;B32B9/00;C08F12/26;C08F20/34;H01L51/50;H05B33/02;H05B33/04;H05B33/10;H05B33/28 主分类号 C08F2/00
代理机构 代理人
主权项
地址