发明名称 |
MANUFACTURING METHOD OF ORGANIC THIN FILM, LAMINATED BODY, AND SUBSTRATE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laminated body consisting of an organic thin film and an inorganic thin film laminated in a vacuum, wherein the entry of foreign matter into the organic thin film is controlled. <P>SOLUTION: Provided are the manufacturing method of organic thin film characterized by polymerizing an ionic liquid monomer in vacuum to form the film; and the laminated body 1 characterized by lamination of the organic thin film 13 obtained by such a method and inorganic thin film layers (a first inorganic thin film layer 12 and a second inorganic film layer 14). <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2012246467(A) |
申请公布日期 |
2012.12.13 |
申请号 |
JP20110121854 |
申请日期 |
2011.05.31 |
申请人 |
SUMITOMO CHEMICAL CO LTD |
发明人 |
YANAGAWA MASAO;SENDA TAICHI;KURODA TOSHIYA;WATANABE KAZUFUMI |
分类号 |
C08F2/00;B32B9/00;C08F12/26;C08F20/34;H01L51/50;H05B33/02;H05B33/04;H05B33/10;H05B33/28 |
主分类号 |
C08F2/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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