| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus for producing ultrapure water in which an installation number of reverse osmosis membrane separation unit is a few. <P>SOLUTION: In the apparatus for producing ultrapure water which has a primary pure water system 2 a sub system 3 for treating treated water of the primary pure water system 2 and in which the reverse osmosis membrane separation units are arranged at least in the primary pure water system 2, the reverse osmosis membrane separation units installed in the primary pure water system 2 are high pressure type reverse osmosis membrane separation units, and characterized by being installed in a single stage. The high pressure type reverse osmosis membrane separation units has properties of standard operation pressure of 5.52 MPa, pure water flux of 0.5 m<SP POS="POST">3</SP>/m<SP POS="POST">2</SP>*D or more, NaCl removing ratio of 99.5% (NaCl 32,000 mg/L) or more. <P>COPYRIGHT: (C)2013,JPO&INPIT |
