| 摘要 |
A non-contact holding device (1) attached to a parallel mechanism robot (100) has a square plate-like base member (10), a Bernoulli chuck (20) attached to the center on a rear surface of the base member (10), and eight pin-like guide members (30) that are disposed facing each other with the Bernoulli chuck (20) therebetween and that are provided on the rear surface of the base member (10) in a protruding manner. The guide members (30) facing each other are configured to be able to move away from each other. These guide members (30) move away from each other along inner surfaces of guide holes (72) of a workpiece mounting tray (70, 71) as the Bernoulli chuck (20) approaches a workpiece mounting surface (75) of the workpiece mounting tray (70, 71). |
