| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for sticking an optical film to a substrate capable of sticking a thin sheet-like object such as an optical film to a substrate highly efficiently without including air bubbles and foreign matters and without generating deflection and wrinkles. <P>SOLUTION: In a vacuum chamber 1, a substrate 10 is moved synchronously with an optical film 12 by a moving device 40 and a pressing device 50 is also moved synchronously with the optical film 12 while the optical film 12 delivered from a delivering part 8 is wound by a winding part 11. While the optical film 12 is moving, holding members 61 and 62 electrostatically chuck the optical film 12 and a pressing plate 51 presses the optical film 12 against the substrate 10. <P>COPYRIGHT: (C)2013,JPO&INPIT |
