| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sample measuring method using a photometer capable of preventing parts from being corroded by ozone gas resulting from the use of an ultraviolet light source and reducing running cost. <P>SOLUTION: A spectrophotometer 10 having an ultraviolet light source 21 and a photodetector 52 is provided with a cover 11 which seals the whole of a light path from the light source 21 to the photodetector 52 and means to allow the inside of the cover 11 to be subject to substitution with nitrogen gas. The spectrophotometer 10 includes a window plate unit 80 which is detachable to a partition wall 22 between a light source chamber 20 for accommodating the light source 21 and a spectrometer 30 at a back stage and capable of blocking the circulation of gas between the light source chamber 20 and the spectrometer 30, allowing a measuring beam to pass through. In the case of measuring in a wavelength region other than the deep ultraviolet region, the window plate unit 80 is attached to the partition wall 22 so that the ozon generated in the vicinity of the light source 21 is prevented from flowing in the spectrometer 30. Parts are thus prevented from being corroded without substitution with nitrogen gas. <P>COPYRIGHT: (C)2013,JPO&INPIT |
