| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a temperature compensation electrostatic capacitive element exhibiting excellent productivity. <P>SOLUTION: The electrostatic capacitive element 10 comprises: a substrate 20; a first capacitor 30 located on the substrate 20; and a second capacitor 40 located on the substrate 20 and electrically connected in parallel with the first capacitor 30. The first capacitor 30 consists of a first lower electrode 31, a first dielectric 32, and a first upper electrode 33. The second capacitor 40 consists of a second lower electrode 41 having a composition different from that of the first lower electrode 31, a second dielectric 42 having the same composition as that of the first dielectric 32, and a second upper electrode 43. The capacity of the first capacitor 30 that changes when the temperature rises and the capacity of the second capacitor 40 that changes when the temperature rises have different signs of positive and negative. <P>COPYRIGHT: (C)2013,JPO&INPIT |
