发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device capable of reducing channel resistance and increasing ON-state current, and making each transistor operate independently and stably, and provide a manufacturing method of the same. <P>SOLUTION: A semiconductor device comprises a first impurity diffusion region 27 provided at a bottom of a gate electrode trench 18, a second impurity diffusion region 28 provided on a semiconductor substrate 13 so as to cover an upper part 21A of a gate insulation film 21 arranged on a first lateral face 18a, and a third impurity diffusion region 29 provided on the semiconductor substrate 13 so as to cover the gate insulation film 21 arranged at least on a second lateral face 18b and joined with the first impurity diffusion region 27. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012248686(A) 申请公布日期 2012.12.13
申请号 JP20110119360 申请日期 2011.05.27
申请人 ELPIDA MEMORY INC 发明人 MIKASA NORIAKI
分类号 H01L21/8242;H01L21/336;H01L27/108;H01L29/78 主分类号 H01L21/8242
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