Ozone generator cells that include two thermally conductive plates that maintain contact between various layers of the cells in the absence of a bonding agent. The cells lack aluminum-containing materials in the discharge region of the cell.
申请公布号
WO2012170276(A1)
申请公布日期
2012.12.13
申请号
WO2012US40173
申请日期
2012.05.31
申请人
MKS INSTRUMENTS, INC.;OWENS, DAVID K.;MENEGHINI, PAUL M.