FLUORINE GAS GENERATOR

摘要

A fluorine gas generator (100) which is characterized by comprising: a cylindrical member (31a) for circulating a main product gas; a gas feed port (51a) for introducing the main product gas into the cylindrical member (31a); a gas discharge port (52a) for discharging the main product gas from the cylindrical member (31a); an adsorbent holding means (201) which is arranged so as to form a space that secures a channel for the main product gas circulated in the cylindrical member (31a); an agitating blade (202) for agitating the main product gas that has been introduced through the gas feed port (51a); and a gas flow guiding tube (203) for circulating or diffusing the main product gas in the space within the cylindrical member (31a).